High-Vacuum Resistance Switch

GN Series

Touch switches that do not emit outgas, which can be a problem in vacuum environments such as vacuum chambers.

The GN series is manufactured using only components that do not produce outgassing and can be used in high vacuum environments up to 10-5 Pa (Pascal pressure unit). Manufactured in a clean room for thorough contamination control.
Numerous applications include semiconductor production lines.

  • Made in Japan
  • Long-selling
  • Cust Reduction
  • Ultra-compact
  • High-vacuum resistance /
    Low out gas
  • Heat-resistant specification

Why Choose Us

Low outgas touch switches that are compatible to high vacuum class

Low outgas touch switches that are compatible to high vacuum class

Made entirely from components that do not generate outgassing, it can be used in high vacuum environments up to 10-5Pa.
The product has been applied to positioning wafers and masks in vacuum evaporation and sputtering equipment by a number of major semiconductor equipment manufacturers.
– Maximum temperature of 120℃
– No grease or oil is used.

Low-cost sensor for use in a vacuum environment

Low-cost sensor for use in a vacuum environment

Vacuum-compatible fiber sensors and displacement sensors cost over $2,000 USD per unit, including amplifiers and connectors.
The GN series is low-cost and enables you to reduce costs.

Extensive lineup to match operating conditions

Extensive lineup to match operating conditions

A wide variety of lineups are available to satisfy various application conditions, such as straight-on touch, right-angle directional cable, and ball contact type, among more.

Material customization to suit the operating environment

Material customization to suit the operating environment

Each customer’s vacuum environment is different.
The sensor body and cable material can be customized to suit your environment.
The image shows the phosphor bronze specification.

Contamination Countermeasures

Contamination Countermeasures

Manufactured in a clean room dedicated to the GN series, which is separate from the regular production line, to ensure strict contamination prevention.

The following customizations are available depending on the application.

The following customizations are available depending on the application.

– Cable length

Depending on the environment of use, we can customize the materials of the parts such as contact probe, cases, cables, or others.

What is a "positioning switch" that does not emit outgas in a vacuum?

Product Line

Applicable for angled-touch measurement (Ball-touch type)

PN Output mode Repeatability Outer Stroke IP code / protective structure LED Price Download
GN-BP161B GN-BP161B B:NC 10μm M16×1 2.9mm IP40 without Buy on
AutomationDirect
GN-BP5MA GN-BP5MA A:NO 10μm M5×0.5 0.8mm IP40 without Buy on
AutomationDirect
GN-BP5MA-R GN-BP5MA-R A:NO 10μm M5×0.5 0.8mm IP40 without Buy on
AutomationDirect

For straight-on touch application

PN Output mode Repeatability Outer Stroke IP code / protective structure LED Price Download
GN-CSK141B GN-CSK141B B:NC 10μm M14×0.5 5mm IP40 without Buy on
AutomationDirect
GN-PT5M3A GN-PT5M3A A:NO 3μm M5×0.5 1.5mm IP40 without Buy on VONA Buy on
AutomationDirect
GN-PT5M3A-R GN-PT5M3A-R A:NO 3μm M5×0.5 1.5mm IP40 without Buy on VONA
GN-PT5M3B GN-PT5M3B B:NC 3μm M5×0.5 1.5mm IP40 without Buy on VONA Buy on
AutomationDirect
GN-PT5M3B-R GN-PT5M3B-R B:NC 3μm M5×0.5 1.5mm IP40 without Buy on VONA

Main Specifications

Repeatability  3μm / 10μm (Range)
Contact Force  0.5N - 1.5N
Outer diameter 5 - 16mm
Overall length 18 - 47mm
How to touch the objects straight-on touch / Angled-touch / Sliding touch
Stroke  1.0mm - 5mm
Protective structure IP40
Operating temperature range 0 - 120℃
Switch structure Dry contact
Output mode A : NO / B : NC
Pretravel 0 - 0.3mm
Movement differential 0
Contact life time 3 million
Contact material A(NO):PEEK / B(NC):SUS HRC45
Case material SUS304
Cable PTFE core-wire cable 0.5m AWG30
Temperature drift 0 (because of no amplifier)
Oscillation 10 - 55Hz Total amplitude 1.5 for X、Y、Z each direction
Impact 300㎨ for X、Y、Z each direction
Contact rating DC5V - DC24V Steady current: 10mA or less (Rush current: 20mA or less)
Standard accessory Two fixing nuts
Compatible vacuum 10 - 5Pa
Allowable baking temperature 120 ℃
Note: Operating speed slower than 10mm/min is NOT recommended.

Applications: (Examples)

Photovoltaic (PV) vacuum equipment

Photovoltaic (PV) vacuum equipment

Photovoltaic (PV) vacuum equipment
Glass substrate positioning

Vacuum deposition system for FPD

Vacuum deposition system for FPD

Mask tray seating detection

Vacuum chamber

Vacuum chamber

Semiconductor wafer presence/absence detection

Vacuum deposition system for FPD

Vacuum deposition system for FPD

Glass substrate alignment

Vacuum deposition system for FPD

Vacuum deposition system for FPD

Carrier originating

Contact