Stable non-contact measurement of battery film thickness down to the micron level
Rechargeable battery industry
A major semiconductor manufacturer that produces rechargeable batteries for electric cars.
A representative of the quality control division consulted us on "thickness measuring" of the filim for rechargeable batteries.
Table of Contents
Client’s Issues
The client tried using microgauges by hand to measure the thickness of 50μm thick battery film;
however, measurement pressure differed depending on the personnel, leading to variance problems in the measurement results.
Optical displacement sensors were also tried for measuring the film thickness;
however, the glossy film surface made it impossible to achieve stable measurement results.
A single measurement took at least 10 minutes when done manually, causing problems with reduced productivity.
The main focus of the issues
The thickness of 50µm thick battery film should be measured stably.
The measurement time taken per sheet need to be reduced.
Metrol’s suggestions
Conventional microgauge measurements have a large variance due to the measurement pressure of the individual, making them unsuitable for use measuring battery film thickness when micron level precision is required.
Metrol's Air Gap Sensor is a non-contact type air sensor containing a uniquely developed pneumatic circuit.
High-accuracy ON/OFF position signal is read from a servo motor to consistently measure a 50μm thick film with a repeat accuracy of ±0.5μm.
Furthermore, automation of measurements drastically reduces the required measurement time by 90% compared to manual measurement.
Improvements
Stably measured the thickness of 50µm thick battery film without contact.
The measurement time was reduced by 90%.
Comment from Metrol representative
As well as the case study mentioned here, they have also been adopted in the semiconductor industry for measuring wafer thickness or ingot diameters, as optical sensors and laser sensors were not capable of consistent measurements at micron levels.
Please feel free to contact us for more detail.
For further information about the products used in this application
Air Gap Sensor [Short range detection type]
Micron-level battery film thickness can be measured without contact!
Continuously adopted in the semiconductor industry that requires high accuracy.
