Realize precision positioning of the stepper motor driving stage

Client’s Issues

The "servo motor" has been used for positioning of the driving part of equipment in micron increments,
however, it is so expensive.

To reduce the total cost, a "stepper motor" was used instead, but it could not control the stage accurately since it was not capable of stop position feedback.
Since the accuracy of the "stepper motor" is imporrant for positioning of the slide table, a high-precision positioning sensor for external input is necessary.

Metrol’s suggestions

Stepper motors are not suited as they cannot control driving parts with high precision because the origin deviates when it is driven.

Despite that METROL's "High-precision Positioning Switch" is of the contact type mechanical switch,
its original contact structure makes 0.5µm repeatability possible.

Checking the origins of the driving part of the stage in micron accuracy realizes high precision positioning of the slide table.
Even low-price stepper motors can achieve as high precision positioning as servo-motors by using it with our precision positioning switch.

Comment from Metrol representative

Like this case, the switch has been widerly adopted for precision XY positioning in applications such as "correcting thermal expansion of the semiconductor inspection tables" and "positioning of the stage of the drilling machine".

If you are in trouble with stage positioning, please feel free to contact us.

For further information about the products used in this application