Vacuum-Resistant Switches [GN]
10-5Pa!
High vacuum class-compatible switches
Used for mask or wafer seating confirmation in vacuum deposition or sputtering systems by major semiconductor production system manufacturers and leading panel production users.
Product list
| Product No. | Output mode | Cable direction | Order | Download | |||
|---|---|---|---|---|---|---|---|
| Worldwide | |||||||
| GN-PT5M3A | A: NO | Straight | SHOP NOW |
Catalog （PDF） |
Manual （PDF） |
2D CAD |
|
| GN-PT5M3B | A: NC | ||||||
| GN-PT5M3A-R | A: NO | 90℃ (R) | |||||
| GN-PT5M3B-R | A: NC | ||||||
Electrical specification｜ Options / Precautions｜ Technical guide
Specification
| Switch structure | Dry contact |
|---|---|
| Output mode | A : NO /B：NC |
| Repeatability | 0.003mm (range) When operating at nomal temperature |
| Allowable baking temperature | 10-5Pa ／ 120℃ |
| Pretravel | 0 (Adjust the installed location of the switch by the signal switching point) |
| Movement differential | 0 |
| Contact life time | 3 million |
| Stroke | 1.5mm |
| Contact force | 0.5N |
| Contact rating | DC5V-DC24V |
Applications
Vacuum chamber
Wafer seating confirmation
Vacuum thin film coating system
Positioning of the glass substrate
Vacuum equipment for PV (photovoltaic power generation)
Positioning of the glass substrate
Vacuum thin film coating system for FPD
Alignment of the glass substrate
Vacuum thin film coating system for FPD
Detection of mask seating
Vacuum thin film coating system for FPD
Carrier positioning
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